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(a) SEM image taken from the bottom of the AAO nanopore membrane. (b) Perspective AFM image taken from the top-surface of the AAO nanopore membrane.
(a) SEM image taken from Si:Er nanodot arrays on Si. (b) AFM image of the as-grown Si:Er nanodot arrays on Si. (c) SEM image of nanodot arrays after postannealing at in air for . (d) Change of Si dot size with variation of postannealing temperature.
PL spectra of (a) as-grown Si:Er nanodot arrays and (b) nanodot arrays postannealed at . The inset shows the change of PL intensity at with variation of the postannealing temperature.
The XPS spectrum taken from the Si:Er thin film grown under the same PLD conditions as those for the fabrication Si:Er nanodot arrays. The peaks at 99.7, 102.0, and correspond to Si–Si, , and , respectively.
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