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Examination of the sample under a light microscope. (a) The micrograph of the surface of the sample after heat treatment ( for in Ar). (b) The schematic diagram of the cross section of the sample.
Examination of the sample. (a) The FE-SEM image of the cross section of the sample after heat treatment ( for in Ar), I: AlN region; II: electrode; III: substrate. EDX confirms that the chemical composition of the sample, (b) Al and Zr, (c) W, (d) Ru.
Crystal structure of the multilayer electrode of the sample. (a) The XRD pattern of the original surface before heat treatment. (b) The XRD pattern of the surface after heat treatment at a temperature of for in Ar.
Schematic diagram of the formation of the solid solution layer during the heat treatment process. The thickness of the W and Ru films was .
Confirmation of piezoelectricity of the sample after heat treatment. (a) The sensor structure and diagram of the test setup. (b) The sensor and load signals as a function of time. The load was .
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