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Ultrahigh temperature vibration sensors using aluminum nitride thin films and multilayer electrodes
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10.1063/1.1850193
/content/aip/journal/apl/86/2/10.1063/1.1850193
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/2/10.1063/1.1850193
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Examination of the sample under a light microscope. (a) The micrograph of the surface of the sample after heat treatment ( for in Ar). (b) The schematic diagram of the cross section of the sample.

Image of FIG. 2.
FIG. 2.

Examination of the sample. (a) The FE-SEM image of the cross section of the sample after heat treatment ( for in Ar), I: AlN region; II: electrode; III: substrate. EDX confirms that the chemical composition of the sample, (b) Al and Zr, (c) W, (d) Ru.

Image of FIG. 3.
FIG. 3.

Crystal structure of the multilayer electrode of the sample. (a) The XRD pattern of the original surface before heat treatment. (b) The XRD pattern of the surface after heat treatment at a temperature of for in Ar.

Image of FIG. 4.
FIG. 4.

Schematic diagram of the formation of the solid solution layer during the heat treatment process. The thickness of the W and Ru films was .

Image of FIG. 5.
FIG. 5.

Confirmation of piezoelectricity of the sample after heat treatment. (a) The sensor structure and diagram of the test setup. (b) The sensor and load signals as a function of time. The load was .

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/content/aip/journal/apl/86/2/10.1063/1.1850193
2005-01-04
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrahigh temperature vibration sensors using aluminum nitride thin films and W∕Ru multilayer electrodes
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/2/10.1063/1.1850193
10.1063/1.1850193
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