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Elastic recoil detection analysis spectra obtained on the silica sample prepared by PECVD (solid line), WTO (dashed line), and DTO (dotted line). (Inset) A zoom of the region between 300 and , for the silica layers obtained by the thermal routes.
Si references spectra of (solid line), (dashed line), and (dotted line).
Si DOS obtained at the interfaces, for different preparations of the silica layer: PECVD (solid line), WTO (dashed line), and DTO (dotted line). The vertical bars show the maxima of the spectra of the reference compounds.
Hydrogen concentration as a function of the preparation of the silica layer, contributions of the reference spectra in the fit of the Si DOS obtained at the interfaces, and thickness of the interfacial zones.
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