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General model and segregation coefficient measurement for ultrashallow doping by excimer laser annealing
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10.1063/1.1927275
/content/aip/journal/apl/86/22/10.1063/1.1927275
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/22/10.1063/1.1927275
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Curve of vs for experimental measurement of . Computed values of are shown by ◇, ◻, 엯, and + for Sb, B, As, and In, respectively. The full line is the fit for all dopant species.

Image of FIG. 2.
FIG. 2.

Experimental vs computed results: Experimental relative profiles are shown by dotted lines marked by + and 엯 for In and As, respectively. Numerical profiles, which are computed with experimental values, are shown by full lines with no mark and ◇ marks for In and As, respectively.

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/content/aip/journal/apl/86/22/10.1063/1.1927275
2005-05-24
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: General model and segregation coefficient measurement for ultrashallow doping by excimer laser annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/22/10.1063/1.1927275
10.1063/1.1927275
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