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Optimized energy window of He beams for accurate determination of depth in channeling Rutherford backscattering spectrometry
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10.1063/1.1941454
/content/aip/journal/apl/86/22/10.1063/1.1941454
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/22/10.1063/1.1941454

Figures

Image of FIG. 1.
FIG. 1.

Channeling RBS spectra of the Sb-doped Si, obtained by using 2-MeV along the axis, as a function of incident angle. The insert shows the Sb profile (deepest) changes due to the tilting.

Image of FIG. 2.
FIG. 2.

Extracted ratio of channeling to random stopping power of 2-MeV ions as a function of tilt angle along the axis (a), and as a function of yield (b).

Image of FIG. 3.
FIG. 3.

Channeling and random spectra of the Sb-doped Si obtained by using 2-MeV ions (a) and 0.6-MeV ions (b).

Image of FIG. 4.
FIG. 4.

Ratio of channeling to random stopping loss of ions along the axis as a function of incident energy in the well channeled direction .

Image of FIG. 5.
FIG. 5.

Comparison of Sb profiles obtained from channeling RBS using either 2- or 0.6-MeV ions, along the axis. The arrow indicates the Sb location measured from TEM.

Tables

Generic image for table
Table I.

He stopping powers and half wavelengths vs He energies.

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/content/aip/journal/apl/86/22/10.1063/1.1941454
2005-05-24
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optimized energy window of He beams for accurate determination of depth in channeling Rutherford backscattering spectrometry
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/22/10.1063/1.1941454
10.1063/1.1941454
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