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-type doping of (001)-oriented single-crystalline diamond by phosphorus
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10.1063/1.1944228
/content/aip/journal/apl/86/22/10.1063/1.1944228
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/22/10.1063/1.1944228

Figures

Image of FIG. 1.
FIG. 1.

Electron densities measured as a function of temperature. Open and close symbols are for (001) and (111) diamond, respectively. Dashed lines are least-square fits to the data applying Eq. (1).

Image of FIG. 2.
FIG. 2.

Electron mobilities as a function of temperature. Open and close symbols are for (001) and (111) diamond, respectively. The straight line shows the slope expected for acoustic phonon scattering .

Image of FIG. 3.
FIG. 3.

Optical microscope image of the grown (001) diamond film.

Image of FIG. 4.
FIG. 4.

SIMS depth profile of (001) diamond (a) and (111) diamond (b). The detection limits are and for H and N atoms, respectively.

Tables

Generic image for table
Table I.

Growth conditions for (001) and (111) phosphorus-doped diamond.

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/content/aip/journal/apl/86/22/10.1063/1.1944228
2005-05-27
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: n-type doping of (001)-oriented single-crystalline diamond by phosphorus
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/22/10.1063/1.1944228
10.1063/1.1944228
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