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Effects of electromigration-induced void dynamics on the evolution of electrical resistance in metallic interconnect lines
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10.1063/1.1947373
/content/aip/journal/apl/86/24/10.1063/1.1947373
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/24/10.1063/1.1947373
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Electrical resistance evolution, , for parameters , , , , and . Inset (a) shows the evolution of the void tip extension across the film width, , and of the void surface area per unit film thickness, . The void configurations shown in insets (b) and (c) correspond to locations (1) and (2) in the evolution curve, respectively.

Image of FIG. 2.
FIG. 2.

Electrical resistance evolution, , for parameters , , , , and . Inset (a) shows the evolution of the void tip extension across the film width, , and of the void surface area per unit film thickness, . In inset (d), is plotted as a function of , where is the time to failure. The void configurations shown in insets (b) and (c) correspond to locations (1) and (2) in the evolution curve, respectively.

Image of FIG. 3.
FIG. 3.

Electrical resistance evolution, , for parameters , , , , and . Inset (a) shows the evolution of the void tip extension across the film width, , and of the void surface area per unit film thickness, . The void configuration shown in inset (b) corresponds to location (1) in the evolution curve.

Image of FIG. 4.
FIG. 4.

Electrical resistance evolution, , for parameters , , , , and . Inset (a) shows the evolution of the void tip extension across the film width, , and of the void surface area per unit film thickness, . The void configuration shown in inset (b) corresponds to location (1) in the evolution curve.

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/content/aip/journal/apl/86/24/10.1063/1.1947373
2005-06-07
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of electromigration-induced void dynamics on the evolution of electrical resistance in metallic interconnect lines
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/24/10.1063/1.1947373
10.1063/1.1947373
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