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DLTS spectra for the He-implanted, 1.7 and electron-irradiated samples with different annealing conditions. A rate window of was used in the measurements.
Peak intensities of as a function of annealing temperature for the He-implanted, 0.3 and electron-irradiated samples.
DLTS spectra (left) and peak intensities (right) of and of the 1.7 and as-electron-irradiated samples as a function of filling pulse width .
DLTS spectra for the annealed He-implanted sample with , rate and filling pulse . The proposed peak causing the anomalous parameters of is highlighted by arrow. The inset shows the Arrhenius plots for and the new defect.
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