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Evolution of the defect structure in helium implanted heterostructures investigated by in situ annealing in a transmission electron microscope
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10.1063/1.1852705
/content/aip/journal/apl/86/4/10.1063/1.1852705
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/4/10.1063/1.1852705
/content/aip/journal/apl/86/4/10.1063/1.1852705
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/content/aip/journal/apl/86/4/10.1063/1.1852705
2005-01-20
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of the defect structure in helium implanted SiGe∕Si heterostructures investigated by in situ annealing in a transmission electron microscope
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/4/10.1063/1.1852705
10.1063/1.1852705
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