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Evolution of the defect structure in helium implanted heterostructures investigated by in situ annealing in a transmission electron microscope
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10.1063/1.1852705
/content/aip/journal/apl/86/4/10.1063/1.1852705
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/4/10.1063/1.1852705
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Figures

Image of FIG. 1.
FIG. 1.

Time evolution in the in situ TEM recorded under kinematical underfocused imaging conditions at in a plan-view specimen. Coarsening of the planar bubble arrangements by coalescence takes place until mostly single bubbles remain after longer annealing times. The dark contrast regions induced by minor diffraction effects due to the high pressure inside the precipitates decrease at longer annealing times.

Image of FIG. 2.
FIG. 2.

Time evolution in the in situ TEM recorded under dynamical bright field imaging conditions at in a plan-view specimen. At helium filled platelets, which lie underneath the heterostructure interface and are visible here as dark areas, dislocation loops nucleate (marked with black arrows) and enlarge in all directions within the interface for distances of several micrometers. In addition threading dislocations cross the area of observation leaving behind misfit segments (marked with white arrow).

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/content/aip/journal/apl/86/4/10.1063/1.1852705
2005-01-20
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of the defect structure in helium implanted SiGe∕Si heterostructures investigated by in situ annealing in a transmission electron microscope
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/4/10.1063/1.1852705
10.1063/1.1852705
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