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Multiple-spot parallel processing for laser micronanofabrication
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Image of FIG. 1.
FIG. 1.

Microlens array (MLA) used in the current research: (a) the overview and its optical microscopic image. The focal length, the lens diameter and separation of the MLA are 1.4 mm, 200 μm, and 250 μm, respectively; (b) the scanning electron microscopic (SEM) image of photopolymerized resin voxels generated on a glass substrate with the present technique.

Image of FIG. 2.
FIG. 2.

Examples of two- and three-dimensional fabrication with the parallel processing technique: (a) the microletter array of ‘N’ was fabricated with 28 exposure points in two dimension, in which totally 227 structures were fabricated using the relay lens of 150-mm-focal length; (b) the example of 3D fabrication, where the self-standing microspring array was fabricated with the relay lens of 80-mm-focal length. The insets give a better view of the individual structures.

Image of FIG. 3.
FIG. 3.

Influence of laser-beam intensity nonuniformity to the voxel sizes: (a) SEM images of a voxel array produced with a single-shot for the evaluations; (b) the voxel sizes obtained at the center and the outer edge of the fabrication area and the averaged row number of the voxels counted on the center line.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multiple-spot parallel processing for laser micronanofabrication