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Depth distribution of implanted in after excimer laser irradiation
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10.1063/1.1856696
/content/aip/journal/apl/86/5/10.1063/1.1856696
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/5/10.1063/1.1856696
/content/aip/journal/apl/86/5/10.1063/1.1856696
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/content/aip/journal/apl/86/5/10.1063/1.1856696
2005-01-28
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Depth distribution of B implanted in Si after excimer laser irradiation
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/5/10.1063/1.1856696
10.1063/1.1856696
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