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Sketch of the experimental setup implemented at the imaging beamline ID19 of the ESRF.
Sampled region in reciprocal space: the direction of the sample coordinate system is defined parallel to the laminographic rotation axis (, as shown in Fig. 1). X rays are incident by an angle of with respect to the axis (a). A single projection in reciprocal space samples a plane perpendicular to the incident-beam direction, cf. vectors and of (b). For a large number of projections the sampled region forms a rotation-symmetric body where two cones of opening angle are missing.
Reconstructed cross-sectional slices along the stacked grids of periods (left) and (right) through the 3D data sets of the computer-generated phantom (top) and of the test object (bottom). Note that the diamond-like shape of the center mark is not mimicked by the computer-generated phantom. Image width is of size.
Renditions of the reconstructed 3D data sets of the computer-generated phantom (a) and of the test object (b). The grids are segmented from the 3D data sets by simple thresholding.
Cross-sectional slice through the 3D data set of a flip-chip bonded device, reconstructed from 900 projections at an axis inclination of and an x-ray energy of . A plane parallel to the printed circuit board is shown. Image width is of size.
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