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High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography
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10.1063/1.1854735
/content/aip/journal/apl/86/7/10.1063/1.1854735
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/7/10.1063/1.1854735
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Sketch of the experimental setup implemented at the imaging beamline ID19 of the ESRF.

Image of FIG. 2.
FIG. 2.

Sampled region in reciprocal space: the direction of the sample coordinate system is defined parallel to the laminographic rotation axis (, as shown in Fig. 1). X rays are incident by an angle of with respect to the axis (a). A single projection in reciprocal space samples a plane perpendicular to the incident-beam direction, cf. vectors and of (b). For a large number of projections the sampled region forms a rotation-symmetric body where two cones of opening angle are missing.

Image of FIG. 3.
FIG. 3.

Reconstructed cross-sectional slices along the stacked grids of periods (left) and (right) through the 3D data sets of the computer-generated phantom (top) and of the test object (bottom). Note that the diamond-like shape of the center mark is not mimicked by the computer-generated phantom. Image width is of size.

Image of FIG. 4.
FIG. 4.

Renditions of the reconstructed 3D data sets of the computer-generated phantom (a) and of the test object (b). The grids are segmented from the 3D data sets by simple thresholding.

Image of FIG. 5.
FIG. 5.

Cross-sectional slice through the 3D data set of a flip-chip bonded device, reconstructed from 900 projections at an axis inclination of and an x-ray energy of . A plane parallel to the printed circuit board is shown. Image width is of size.

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/content/aip/journal/apl/86/7/10.1063/1.1854735
2005-02-10
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/7/10.1063/1.1854735
10.1063/1.1854735
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