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(a) Setup for 3D photonic crystal fabrication. Two phase masks and photoresist were mounted on two motion stages, respectively, controlled by computer. (b) Simulated woodpile-type photonic crystal that can be fabricated by the phase mask technique.
Photonic band structure diagram for a face-centered-tetragonal photonic crystal with . The position of the high symmetry points together with the irreducible Brillouin zone are shown in the inset.
Optimum photonic band gap sizes and aspect ratios of the optimized cross section of the rods as a function of lattice constant ratio . The closed symbols are the data for bcc and fcc photonic structure when and , respectively.
Scanning electron microscope (SEM) of woodpile-type photonic crystal recorded in the modified SU-8 photoresist: (a) top view of the photonic structure in (001) plane; (b) cleaved cross-section view of the photonic structure. The elliptical rods of second neighbor are clearly seen to be shifted by half lattice constant in the direction perpendicular to the rod axes.
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