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Double layer formation in the expanding region of an inductively coupled electronegative plasma
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10.1063/1.1869533
/content/aip/journal/apl/86/9/10.1063/1.1869533
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/9/10.1063/1.1869533
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the experimental setup.

Image of FIG. 2.
FIG. 2.

Spatial evolution of the plasma potential, , and the electronegativity, , in (a) the no DL case (6% mixture), and (b) the DL case (9% mixture), at 1 mTorr, 600 W.

Image of FIG. 3.
FIG. 3.

Spatial evolution of the particles densities and electron temperature for a 9% mixture at 1 mTorr, 600 W.

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/content/aip/journal/apl/86/9/10.1063/1.1869533
2005-02-24
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Double layer formation in the expanding region of an inductively coupled electronegative plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/9/10.1063/1.1869533
10.1063/1.1869533
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