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Process flow for the SIMOX fabrication of microdisk structures (cross-sectional view).
Cross-sectional schematic depicting the coupling region between a buried waveguide and a microdisk resonator.
SEM picture of the fabricated microdisk resonators on the top silicon layer with bus waveguides underneath.
Top view of the fabricated add-drop filter.
Experimental setup used to characterize the add-drop filter.
Filter characteristics of the fabricated add-drop filter.
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