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Optical study of disorder and defects in hydrogenated amorphous silicon carbon alloys
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10.1063/1.1968413
/content/aip/journal/apl/87/1/10.1063/1.1968413
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/1/10.1063/1.1968413

Figures

Image of FIG. 1.
FIG. 1.

Effect of the addition of methane flow on the absorption coefficient deduced from PDS measurements calibrated at high energy by results inferred from spectroscopic ellipsometry. The lines indicate the Urbach slope usually deduced from the exponential part of the absorption coefficient.

Image of FIG. 2.
FIG. 2.

PDS absorption spectra for a-SiC:H samples with thickness of 0.32 and of deposited under the same condition.

Image of FIG. 3.
FIG. 3.

Effect of the methane flow rate on the absorption coefficient deduced from PDS measurements on thin films . The high-energy part of the spectra deduced from spectroscopic ellipsometry measurements was used to calibrate the absorption coefficient deduced from PDS.

Image of FIG. 4.
FIG. 4.

Absorption coefficient as a function of the photon energy calculated from the three-defect-peak model.

Tables

Generic image for table
Table I.

Optical properties of a-SiC:H alloys deposited at various methane flow rates determined from spectroscopic ellipsometry measurements. L1 and L2 correspond to the film thickness and surface roughness, respectively; the other parameters are deduced from the measured spectra analysis using the Tauc-Lorentz model (see Ref. 9).

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/content/aip/journal/apl/87/1/10.1063/1.1968413
2005-06-28
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optical study of disorder and defects in hydrogenated amorphous silicon carbon alloys
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/1/10.1063/1.1968413
10.1063/1.1968413
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