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Effect of the addition of methane flow on the absorption coefficient deduced from PDS measurements calibrated at high energy by results inferred from spectroscopic ellipsometry. The lines indicate the Urbach slope usually deduced from the exponential part of the absorption coefficient.
PDS absorption spectra for a-SiC:H samples with thickness of 0.32 and of deposited under the same condition.
Effect of the methane flow rate on the absorption coefficient deduced from PDS measurements on thin films . The high-energy part of the spectra deduced from spectroscopic ellipsometry measurements was used to calibrate the absorption coefficient deduced from PDS.
Absorption coefficient as a function of the photon energy calculated from the three-defect-peak model.
Optical properties of a-SiC:H alloys deposited at various methane flow rates determined from spectroscopic ellipsometry measurements. L1 and L2 correspond to the film thickness and surface roughness, respectively; the other parameters are deduced from the measured spectra analysis using the Tauc-Lorentz model (see Ref. 9).
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