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The and XPS spectra of Er-doped thin films. The ratio represents the ratio of deposition cycles. The XPS spectra for pure and were also shown for comparison.
The atomic percentage (at. %) of Y and Er measured in Er-doped thin films deposited at various ratio. The composition was determined by ex-situ XPS, thus an ambient contamination of C and 15 at. % O was included in these calculations.
Room-temperature PL spectra of an as-deposited 320-Å Er-doped film containing 9 at. % Er. The sample was deposited at 350 °C by alternating ten cycles of and five cycles of .
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