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Schematic cross-sectional view of a metal-defined EO optical waveguide phase modulator. Metal thin film was deposited by electron-beam evaporation at a temperature of . The waveguide-defining metal film acts as the driving electrode in the case of an EO phase modulator.
Total strain profiles of the MDOW with a wide metal stripe on polymer using ANSYS. (a) strain , and (b) . Only one-half of the cross section is depicted, since the strain fields are symmetric about the center of the structure. The negative values indicate regions of compressive strain and positive values indicate tensile strain.
Calculated fundamental optical modal shapes (a) and (b), and measured near-field patterns (c) and (d) of the MDOW at wavelength. The TE mode is calculated from the horizontal refractive index profile, while the TM mode is vertical and is found from the refractive indices.
Low-frequency EO response of the MDOW phase modulator at TM-polarized wavelength. It shows a of and an extinction ratio of larger than . All of the waveguides were defined with a wide waveguide and corona-poling procedure.
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