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Annealing effects on the loss and birefringence of silicon oxynitride rectangular optical waveguides
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10.1063/1.2037856
/content/aip/journal/apl/87/10/10.1063/1.2037856
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/10/10.1063/1.2037856
/content/aip/journal/apl/87/10/10.1063/1.2037856
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/content/aip/journal/apl/87/10/10.1063/1.2037856
2005-08-29
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Annealing effects on the loss and birefringence of silicon oxynitride rectangular optical waveguides
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/10/10.1063/1.2037856
10.1063/1.2037856
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