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Studies of the annihilation mechanism of threading dislocation in AlN films grown on vicinal sapphire (0001) substrates using transmission electron microscopy
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10.1063/1.2042533
/content/aip/journal/apl/87/10/10.1063/1.2042533
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/10/10.1063/1.2042533
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Figures

Image of FIG. 1.
FIG. 1.

Images of AlN grown on a 2.0°-off vicinal sapphire (0001) substrate, (a) cross-sectional image at zone axis. The DF weak-beam image was taken by the reflection under the diffraction condition that the reflection satisfies the Bragg condition. Arrows indicate the positions where macrosteps exist on the surface, (b) plan-view BF image at the exact [0001] zone axis showing the periodic distribution of TDs on the surface.

Image of FIG. 2.
FIG. 2.

DF plan-view images of a half dislocation loop. (a) DF weak-beam image taken at the diffraction condition that reflection satisfies the Bragg condition in the systematic low of reflections. (b) DF weak-beam image at the Bragg condition in systematic reflections, (c) DF weak-beam image taken by the reflection at the Bragg condition. (d) Illustration of the formation mechanism of a half dislocation loop.

Image of FIG. 3.
FIG. 3.

DF plan-view images of a dislocation network. (a) DF weak-beam image taken at the diffraction condition that reflection satisfies the Bragg condition in the systematic low of reflections. (b) DF weak-beam image at the Bragg condition in systematic reflections, (c) DF weak-beam image taken by the reflection at the Bragg condition. (d) Illustration of the formation mechanism of the dislocation network. The Burger’s vectors of those segments SG1, SG2 and SG3 are determined to be , , and , respectively.

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/content/aip/journal/apl/87/10/10.1063/1.2042533
2005-09-02
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Studies of the annihilation mechanism of threading dislocation in AlN films grown on vicinal sapphire (0001) substrates using transmission electron microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/10/10.1063/1.2042533
10.1063/1.2042533
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