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Mechanical properties of self-welded silicon nanobridges
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Image of FIG. 1.
FIG. 1.

SEM image of the region between two posts, showing both single-clamped (cantilever) and double-clamped (bridge) nanowire beam configurations.

Image of FIG. 2.
FIG. 2.

Experimental configuration for measuring the mechanical properties of silicon nanowires. (a) Side view of the cantilever nanowire. (b) Side view of the bridge nanowire. The wires were grown from the base end (denoted by B) and are self-welded to the opposing post (denoted by SW). The force in (a) and (b) is applied using an AFM. (c) Nanowire cross sections are typically circular with diameter . (d) The setup used in magnetomotive dynamic measurement of nanowire beam (with length L) resonance frequency.

Image of FIG. 3.
FIG. 3.

Magnetomotive oscillation spectra of nanowires for different magnetic fields.

Image of FIG. 4.
FIG. 4.

Force vs displacement (load-deflection) behavior measured using AFM for a cantilever silicon nanowire (Sample I in Table I) at from the base end. Young’s modulus is determined from the linear region below 500 nm deflection.

Image of FIG. 5.
FIG. 5.

Load-deflection curves obtained for nanowire bridge beams for Samples II and III .

Image of FIG. 6.
FIG. 6.

(a) SEM image near base end of nanowires broken during mechanical testing. (b) A higher magnification view of the broken nanowire shown in (a).


Generic image for table
Table I.

Static and dynamic Young’s modulus and maximum bending stress determined using AFM and magnetomotive force measurements.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanical properties of self-welded silicon nanobridges