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Cross-sectional TEM images and corresponding AFM surface morphology of films grown using [(a) and (b)] and [(c) and (d)] as oxygen sources. The distance among ten planes is shown in (a). The AFM images are side and the grey scale corresponds to .
Grazing incidence XRD spectra (a) of thick films deposited using (bottom) and (top). (b) Bragg–Brentano analysis of the film deposited using .
TOF-SIMS depth profiles of thick grown using (a) and (b).
characteristics at different frequencies of the thick film grown using (gate area: ). Inset: Leakage currents for different thicknesses of films grown using .
CET as a function of physical thickness for films grown using . The CET of a thick film grown using is also shown.
Thickness , electronic density , and root-mean-square surface roughness of the films and of the IL at the interface. The error on the last digit is indicated in the brackets.
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