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Formation of nanopores in a membrane with an electron beam
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10.1063/1.2043247
/content/aip/journal/apl/87/11/10.1063/1.2043247
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2043247
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Plot of the shape of the beam (solid line) and the thickness variation (dashed line) around the hole. (b) Two conjectured geometries of the pore cross section. (There are many possibilities, only two simple ones are shown here.) (c) A HREM image of the pore having a diameter of .

Image of FIG. 2.
FIG. 2.

Intensity of oxygen and nitrogen edges, recorded from film as a function of irradiation time: (a) layer at the entrance plane and (b) SiN at the entrance plane.

Image of FIG. 3.
FIG. 3.

edges, recorded from film with SiN on top during nanopore formation and closure: 1—Start; 2—Halfway; 3—Shortly before the pore opened; 4—Edge of the pore; 5—Pore almost closed; and 6—Pore completely closed. Note that one has to use a very low beam intensity to stop the growth or shrinking of the pore. Therefore, the lower three profiles have very low intensity comparing to the top three profiles.

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/content/aip/journal/apl/87/11/10.1063/1.2043247
2005-09-07
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation of nanopores in a SiN∕SiO2 membrane with an electron beam
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2043247
10.1063/1.2043247
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