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Silicon layer transfer using plasma hydrogenation
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10.1063/1.2048811
/content/aip/journal/apl/87/11/10.1063/1.2048811
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2048811
/content/aip/journal/apl/87/11/10.1063/1.2048811
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/content/aip/journal/apl/87/11/10.1063/1.2048811
2005-09-08
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon layer transfer using plasma hydrogenation
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2048811
10.1063/1.2048811
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