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Effect of pore interconnection on Cu-diffusion-induced failures in porous spin-on low- dielectrics
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10.1063/1.2048822
/content/aip/journal/apl/87/11/10.1063/1.2048822
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2048822
/content/aip/journal/apl/87/11/10.1063/1.2048822
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/content/aip/journal/apl/87/11/10.1063/1.2048822
2005-09-09
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of pore interconnection on Cu-diffusion-induced failures in porous spin-on low-k dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2048822
10.1063/1.2048822
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