1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
thin films for high-performance metal-insulator-metal capacitors
Rent:
Rent this article for
USD
10.1063/1.2048827
/content/aip/journal/apl/87/11/10.1063/1.2048827
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2048827
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional TEM bright-field image of the film grown at 550 °C for 30 min and thermal annealed at 900 °C for 3 min.

Image of FIG. 2.
FIG. 2.

Capacitance density and loss tangent of the MIM capacitor as a function of frequency. The inset shows the leakage current density of the MIM capacitor as a function of the applied voltage.

Image of FIG. 3.
FIG. 3.

Capacitance density and loss tangent of the circular patched capacitor measured in the rf range.

Image of FIG. 4.
FIG. 4.

Variation of the capacitance density of the MIM capacitor measured at various frequencies as a function of the applied voltage.

Image of FIG. 5.
FIG. 5.

Variation of the capacitance density of the MIM capacitor measured at various frequencies as a function of the temperature.

Loading

Article metrics loading...

/content/aip/journal/apl/87/11/10.1063/1.2048827
2005-09-08
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: BaTi4O9 thin films for high-performance metal-insulator-metal capacitors
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/11/10.1063/1.2048827
10.1063/1.2048827
SEARCH_EXPAND_ITEM