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Control and analysis of ion species in inductively coupled nitration plasma using a grid system
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10.1063/1.2056595
/content/aip/journal/apl/87/12/10.1063/1.2056595
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/12/10.1063/1.2056595
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The measured ion density ratio of to and electron temperature in Region II as a function of grid bias voltage .

Image of FIG. 2.
FIG. 2.

The measured plasma parameters in Region II as a function of the grid bias voltage: (a) electron density (b) plasma potential in Region II , (c) potential difference between the Regions I and II , and (d) sheath length around grid wires as a function of .

Image of FIG. 3.
FIG. 3.

The ion production ratio of the ion flux diffusing from Region I to the ionization rate in Region II as function of in Regime 2.

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/content/aip/journal/apl/87/12/10.1063/1.2056595
2005-09-15
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Control and analysis of ion species in inductively coupled nitration plasma using a grid system
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/12/10.1063/1.2056595
10.1063/1.2056595
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