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Surface distribution of products formed on Fe-coated c-Si underneath the WC tube electrode at different regions A, B, and C along with a schematic of the plasma exposure area. The inner diameter of tube electrode and the electrode-substrate distance were and , respectively. The regions A, B, and C present , 400–500, and areas, respectively.
SEM images of products formed in region A at different exposure time of a methane-argon mixture. Methane was supplied independently from outside under the steady flow of an argon plasma at of .
EDX mapping images of the Si, C, Fe, and O elements in region A, where SNC is synthesized.
TEM images of corresponding silicon and carbon nanostructures synthesized in regions A and B.
Schematic of the growth model of SNCs synthesized on Fe-coated c-Si.
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