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Synthesis of silicon nanocones using rf microplasma at atmospheric pressure
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View: Figures


Image of FIG. 1.
FIG. 1.

Surface distribution of products formed on Fe-coated c-Si underneath the WC tube electrode at different regions A, B, and C along with a schematic of the plasma exposure area. The inner diameter of tube electrode and the electrode-substrate distance were and , respectively. The regions A, B, and C present , 400–500, and areas, respectively.

Image of FIG. 2.
FIG. 2.

SEM images of products formed in region A at different exposure time of a methane-argon mixture. Methane was supplied independently from outside under the steady flow of an argon plasma at of .

Image of FIG. 3.
FIG. 3.

EDX mapping images of the Si, C, Fe, and O elements in region A, where SNC is synthesized.

Image of FIG. 4.
FIG. 4.

TEM images of corresponding silicon and carbon nanostructures synthesized in regions A and B.

Image of FIG. 5.
FIG. 5.

Schematic of the growth model of SNCs synthesized on Fe-coated c-Si.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Synthesis of silicon nanocones using rf microplasma at atmospheric pressure