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(a) Plan-view HRTEM image of pure TiN thin film, and (b) SAD pattern.
(a) Plan-view HRTEM image of thin film and corresponding FFT spectrum, and (b) SAD pattern.
(a) Plan-view TEM image of thin film at a low magnification, and (b) plan-view HRTEM image of a typical nanocrystallite in (a) and corresponding FFT spectrum. The streaking in the spectrum indicates the presence of strain in the nc-grain shown.
Mean grain size as a function of B content.
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