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Schematic diagram showing the process for fabrication of the nanopattern apertures.
TEM image with a boundary between the two areas of different growth modes. The insets are the Fourier transform for the FIB-guided area (right corner), and self-organized area (left corner), respectively.
TEM images of the randomly selected area in different scales, the inset is the profile of the selected aperture (the middle one in the bottom line).
The statistical analysis for two growth modes: (a) Aperture size distribution in FIB-guided area; (b) interspacing distribution in FIB-guided area; (c) aperture size distribution in self-organized area; and (d) interspacing distribution in self-organized area.
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