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Approach to nonphotoperturbed differential capacitance measurements: A front-wing cantilever
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10.1063/1.1994949
/content/aip/journal/apl/87/2/10.1063/1.1994949
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/2/10.1063/1.1994949
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of a conductive tip in conjunction with an FW cantilever; (b) The schematic setup shows that FW structure provides a smaller glancing angle for the stray light incidence.

Image of FIG. 2.
FIG. 2.

(a) Schematic diagram of the two AFM laser beam setups. Sites 1 and 2 are on the front edge of the cantilever and on the normal aligned position for contact mode AFM operation, respectively. (b) The SCS profiles for Sites 1 and 2 shown in (a).

Image of FIG. 3.
FIG. 3.

Cross-sectional SCM images of the low-energy--implanted region for (a) Setup 2 and (b) Setup 3. (c) The AFM image corresponds to the SCM image in (a).

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/content/aip/journal/apl/87/2/10.1063/1.1994949
2005-07-06
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Approach to nonphotoperturbed differential capacitance measurements: A front-wing cantilever
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/2/10.1063/1.1994949
10.1063/1.1994949
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