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Normalized compressive stress in films vs the number of the implantation-induced dpa.
IR absorption wagging-rocking modes in the as-deposited and ion-implanted films.
IR absorption stretching modes in -SiH films: (a) As deposited, (b) silicon implanted, and (c) hydrogen implanted.
Relative weight of IR stretching modes of the monohydride and clustered hydrogen bonding groups vs the number of the implantation-induced dpa.
Normalized compressive stress vs the relative weight of IR stretching modes of the clustered hydrogen bonding groups, .
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