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Dispersion relation of a guide mode of a photonic crystal waveguide.
Schematic diagram of the silicon Mach-Zehnder PhC modulator. Electrode structure of the modulator with PIP regions indicated.
SEM pictures of the silicon PhC modulator: (a) overview picture of the modulator. (b) PhC waveguide with two electrodes. (c) Y-junction. (d) Magnified PhC waveguide based on a triangular lattice with lattice constant , hole diameter , and top Si thickness , buried oxide (BOX) thickness of .
Modulation characteristics: (a) intensity vs injection current, 92% modulation depth is achieved at ; (b) modulation curve of sinusoidal wave with a peak current of .
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