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High-resolution differential thermography of integrated circuits with optical feedback laser scanning microscopy
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10.1063/1.2138794
/content/aip/journal/apl/87/23/10.1063/1.2138794
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/23/10.1063/1.2138794
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Figures

Image of FIG. 1.
FIG. 1.

(a) SL-based confocal microscope with OF detection of reflected signal from IC sample on a triaxis stage where , , , , , and ; and (b) theoretical (solid curve) and measured (circles) axial response of confocal microscope.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Confocal image =85 mA, SL output=44.1 mW) indicating the four sites under test, (b) OBIC output of four sites vs IC temperature , (c) thermal gradient map (left) of normal semiconductor sites 3 and 4 and its overlay (right) with confocal image, and (d) thermal map (left) of anomalous sites 1 and 2 and its overlay (right) with confocal image.

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/content/aip/journal/apl/87/23/10.1063/1.2138794
2005-11-28
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-resolution differential thermography of integrated circuits with optical feedback laser scanning microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/23/10.1063/1.2138794
10.1063/1.2138794
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