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Application of a downstream calorimetric probe to reactive plasma
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10.1063/1.2140088
/content/aip/journal/apl/87/23/10.1063/1.2140088
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/23/10.1063/1.2140088
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the test manifold used in present work.

Image of FIG. 2.
FIG. 2.

Schematic of calorimetric probe construction. The probe element is supported by two nickel-coated prongs positioned on a machined polyimide platform. The assembly is mounted on an aluminum KF40 flange.

Image of FIG. 3.
FIG. 3.

Temporal evolutions of calorimetric probe resistance and amu38 from RGA. A train of four pluses, each with a different flow, was used to explore the probe response. The data collection intervals for the probe and RGA were 1 and , respectively.

Image of FIG. 4.
FIG. 4.

Post-exposure probe resistance change and calculated temperature rise are plotted as functions of flow.

Image of FIG. 5.
FIG. 5.

Calorimetric probe resistance and calculated temperature rise are plotted against RGA amu38 partial pressure. The maximum values within a pulse are used for both DCP and RGA signals.

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/content/aip/journal/apl/87/23/10.1063/1.2140088
2005-12-01
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Application of a downstream calorimetric probe to reactive plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/23/10.1063/1.2140088
10.1063/1.2140088
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