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(a) FE-SEM image of Au nanoplates synthesized by the chemical reaction. (b) Electron diffraction pattern of an Au nanoplate obtained for the electron beam perpendicular to the plane. (c) Energy-dispersive x-ray spectroscopy of an Au nanoplate.
A schematic diagram for the fabrication of nanocomponents by the FIB (Process-A) and electron beam (Process-B) nanolithography. A set of numbers and dots is written on the substrate to read the accurate position of each Au nanoplate.
(a) FE-SEM image of a nanoplate damaged by over etching when the ion beam current is or more. (b) FE-SEM images of a nanogear fabricated using and FIB.
Successive FE-SEM images for the manipulation of a nanowheel. (a) Approaching a nanotip to the nanowheel. (b) The nanowheel is detached from the original site and rotated slightly by pushing the lower part of it with a nanotip. (c) The nanowheel is moved from right to left by about . (d) The nanotip is detached safely from the nanowheel after moving it to the target position. Tiny spots around the nanowheel are dusts attacted.
(a) FE-SEM image of a nanostructure with hardened electron beam resist around etched regions. FE-SEM images of (b) a nanoletter “A,” (c) a nanodumbbell, and (d) nanosquares fabricated by electron beam nanolithography and ion milling.
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