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(a) A wafer structure for PC membrane nanocavities. (b) Room-temperature PL spectra at different locations of a 2 in. sized as-grown wafer.
(Color online) (a) A schematic of PEC etching process to make PC membrane nanocavities. (b) A SEM of an L7 cavity with and . (c) A side view of the rectangular opening. (d) The enlarged view of air holes near the center.
(a) Resonance modes of L7 cavities with and , , and from top to bottom. Tuning behaviors of L7 cavities with (b) and (c) , where dots with error bars are the experimental data while lines are the results of 3D FDTD calculations.
(Color online) The factors of the mode as a function of while is fixed at . The insets show the electric-field intensity distributions for and at the center of the membrane.
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