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Interface traps and dangling-bond defects in
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10.1063/1.1947372
/content/aip/journal/apl/87/3/10.1063/1.1947372
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/3/10.1063/1.1947372
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Figures

Image of FIG. 1.
FIG. 1.

curves measured at 300 [(a) and (b)] and [(c) and (d)] on - (filled symbols) and -type (empty symbols) capacitors. Data are shown for the as-grown (엯, ●), VUV-depassivated (◻, ∎), and -passivated (▵, ▴) samples, and samples subjected to the oxidizing PDA (◇, ◆).

Image of FIG. 2.
FIG. 2.

Interface trap density as a function of energy in the Ge band gap determined from low- and high-frequency (open symbols) and (filled symbols) curves of - and -type MOS capacitors (the lower and upper halves of the band gap, respectively). The results are shown for the as-grown (엯, ●), VUV-depassivated (◻), -passivated (▵) samples, and samples subjected to PDA in (◇, ◆). The origin of the energy scale is at the top of the Ge valence band; error bars shown indicate the uncertainty mainly related to the inaccuracy of surface potential determination.

Image of FIG. 3.
FIG. 3.

-band ESR spectra observed under an incident microwave power of on (100)Ge samples with nm thick insulating overlayers of the indicated composition. The signal at stems from a co-mounted calibration Si:P marker sample.

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/content/aip/journal/apl/87/3/10.1063/1.1947372
2005-07-13
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interface traps and dangling-bond defects in (100)Ge∕HfO2
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/3/10.1063/1.1947372
10.1063/1.1947372
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