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Effect of annealing on leakage current in and thin films with Pt electrodes
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View: Figures


Image of FIG. 1.
FIG. 1.

XRD patterns for BCTZ and BST thin films on Pt before and after anneals in at . The unannealed BCTZ film (a) shows both (100) and (110) orientation. The annealed BCTZ film (b) shows a shift in the peak positions, but little change in the peak shape and height. The unannealed BST film (c) shows only a (100) peak. This peak increases in height, narrows, and shifts after the anneal (d).

Image of FIG. 2.
FIG. 2.

Schottky barrier height vs anneal temperature for BCTZ and BST thin films. The dashed lines with triangle symbols show barrier heights for samples before postannealing. Solid symbols show results for BST, open symbols show BCTZ results. Circles are for anneals and squares are for forming gas anneals. Note the lower barrier heights for BST in the as deposited state and the higher sensitivity to anneal gas composition, as compared with BCTZ. Error bars are provided in cases where error is significant, as is the case for low leakage currents (high barriers).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of annealing on leakage current in Ba0.5Sr0.5TiO3 and Ba0.96Ca0.04Ti0.84Zr0.16O3 thin films with Pt electrodes