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Highly ordered self-organized dot patterns on Si surfaces by low-energy ion-beam erosion
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15.The ion-optical system (or extraction system) of our homebuilt Kaufman-type broad beam ion source is composed of two multiaperture grids manufactured from high-purity graphite (hole circle diameter ). The total voltage applied between the two grids (screen and accelerator grid) is the sum of the absolute values of beam (determining the ion energy) and accelerator voltage. This total voltage, together with the geometrical dimensions, including the shape of the plasma sheath boundary at the screen grid, define the ion-optical parameters of the source (ion-beam divergence and angular distribution of the ions within the beam, respectively). The extraction system used has the following specifications: spacing between grids ; thickness of grids and for the screen and accelerator grid, respectively; aperture hole diameter . Under these conditions, a sufficient beam divergence and angular distribution were obtained for an accelerator-grid voltage of .
16.S. Facsko (private communication).
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