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Quantitative determination of the clustered silicon concentration in substoichiometric silicon oxide layer
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10.1063/1.1999839
/content/aip/journal/apl/87/4/10.1063/1.1999839
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/4/10.1063/1.1999839
/content/aip/journal/apl/87/4/10.1063/1.1999839
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/content/aip/journal/apl/87/4/10.1063/1.1999839
2005-07-19
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantitative determination of the clustered silicon concentration in substoichiometric silicon oxide layer
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/4/10.1063/1.1999839
10.1063/1.1999839
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