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The polarity results by EH, (a)–(c) for Sample A and (d)–(f) for Sample B: the hologram of ZnO films [(a) and (d)], the reconstructed phase image [(b) and (e)], the averaged one-dimensional phase change profile [(c) and (f)] obtained from the boxed area in [(b) and (e)].
The HRTEM micrographs of Sample A (a), Sample B (b), and Sample C (e) taken along . (c) and (d) are the Fourier-filter images of (a) and (b), respectively. The insets in (a) and (b) are diffraction patterns from the interface layers.
The schematic representations of the atomic arrangements of ZnO on (0001) sapphire with zinc blende structure of AlN interlayer along  direction (a) and [1-11] direction (b) epitaxy.
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