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Grain size effect on the semiconductor-metal phase transition characteristics of magnetron-sputtered thin films
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10.1063/1.2001139
/content/aip/journal/apl/87/5/10.1063/1.2001139
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2001139
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Electrical switching behavior of magnetron-sputtered thin films with different thicknesses. The inset shows an example (the 350 nm-thick sample) of the quantitative analysis made using the derivative of the curve.

Image of FIG. 3.
FIG. 3.

Selected SEM micrographs of the thin films with different thicknesses: (a) Cross section and (b) top view of a 350 nm-thick film, (c) top view of a 50 nm-thick film, and (d) top view of a -thick film.

Image of FIG. 2.
FIG. 2.

Grazing-incidence XRD spectra of the thin films, acquired at room temperature, as a function of their thickness. The inset shows the variation of the average grain size with film thickness.

Image of FIG. 4.
FIG. 4.

Cross plot showing the variation of the amplitude and sharpness of the SMT of the thin films as a function of their average grain size. Horizontal and vertical error bars represent uncertainty in grain size determination and statistical variation of SMT parameters, respectively.

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/content/aip/journal/apl/87/5/10.1063/1.2001139
2005-07-26
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Grain size effect on the semiconductor-metal phase transition characteristics of magnetron-sputtered VO2 thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2001139
10.1063/1.2001139
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