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Three-dimensional atom mapping of dopants in Si nanostructures
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10.1063/1.2005368
/content/aip/journal/apl/87/5/10.1063/1.2005368
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2005368
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM image of a Si microtip coupon.

Image of FIG. 2.
FIG. 2.

(Color online) An atomic map of As (large spheres) implanted into Si (red dots). Only 0.2% of the Si atoms are shown for visualization clarity.

Image of FIG. 3.
FIG. 3.

A comparison of 1D As composition profiles obtained from 3D LEAP and SIMS analysis.

Image of FIG. 4.
FIG. 4.

A 3D atomic map showing the boron (black spheres) distribution in a heavily doped poly-Si structure. For clarity, the Si atoms are not shown. The cluster under investigation is in the bottom left corner and is demarked by the lateral 1D composition profile markers.

Image of FIG. 5.
FIG. 5.

(a) Longitudinal 1D composition profiles in the “-direction” for the (a) bulk-Si region and for the cluster region. (b) Lateral 1D composition profiles through the cluster region along the (c) and (d) planes.

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/content/aip/journal/apl/87/5/10.1063/1.2005368
2005-07-27
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Three-dimensional atom mapping of dopants in Si nanostructures
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2005368
10.1063/1.2005368
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