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SEM image of a Si microtip coupon.
(Color online) An atomic map of As (large spheres) implanted into Si (red dots). Only 0.2% of the Si atoms are shown for visualization clarity.
A comparison of 1D As composition profiles obtained from 3D LEAP and SIMS analysis.
A 3D atomic map showing the boron (black spheres) distribution in a heavily doped poly-Si structure. For clarity, the Si atoms are not shown. The cluster under investigation is in the bottom left corner and is demarked by the lateral 1D composition profile markers.
(a) Longitudinal 1D composition profiles in the “-direction” for the (a) bulk-Si region and for the cluster region. (b) Lateral 1D composition profiles through the cluster region along the (c) and (d) planes.
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