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Nanostaircases: An atomic shadowing instability during epitaxial CrN(001) layer growth
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10.1063/1.2005369
/content/aip/journal/apl/87/5/10.1063/1.2005369
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2005369
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Atomic force micrographs from layers deposited at 700 °C from an oblique angle with thicknesses (a) 57 nm and (b) 230 nm.

Image of FIG. 2.
FIG. 2.

(a) Cross-sectional transmission electron micrograph near the [100] zone axis with (b) a corresponding selected area electron diffraction pattern including a higher magnification pattern from the 024 spots in the inset, and (c) a higher magnification micrograph from the nanostaircase in (a), from a 57-nm-thick layer grown at 700 °C with an oblique deposition angle .

Image of FIG. 3.
FIG. 3.

Schematic illustrating the formation of nanostaircases by kinetic faceting along orthogonal {100} planes. The letters , , and refer to a high, low, and negligible deposition rate for the respective surfaces, respectively. denotes the nucleation length and the facet size.

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/content/aip/journal/apl/87/5/10.1063/1.2005369
2005-07-27
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanostaircases: An atomic shadowing instability during epitaxial CrN(001) layer growth
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2005369
10.1063/1.2005369
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