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(a) Schematic diagram of the test structure of MIM capacitor; (b) TEM image of the MIM capacitor with individual barrier; (c) frequency-dependent dielectric constant and dissipation factor for all the dielectrics with a thickness of individual barrier from zero to .
(a) Plot of normalized capacitance vs dc bias, together with the fitted curves (the solid lines) and the extracted and (ppm∕V) values at ; (b) dependence of on frequency for all the dielectrics.
Typical leakage current density as a function of electric field at for the MIM capacitors with various dielectrics, the inset shows time-to-breakdown characteristics of all the dielectrics under the same electric field stress of .
(a) Plots of vs for the capacitors with various dielectrics at room temperature, the inset shows a linear fitting corresponding to the MIM capacitor; (b) representative plots of vs at 0.7 and for the samples without and with individual barriers.
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