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Tactile microsensor elements prepared from arrayed superelastic carbon microcoils
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View: Figures


Image of FIG. 1.
FIG. 1.

As-grown scanning electron microscope images of superelastic carbon microcoils (SCMCs).

Image of FIG. 2.
FIG. 2.

Change in and parameters of SCMC sensor element under applied stresses. Size of sensor element: ; separation of electrode: . (a) Sticking by a needle; (b) touching by a soft brush.

Image of FIG. 3.
FIG. 3.

(a) Change in C parameter while applying small loads of about and (b) relationship between C and log (load).

Image of FIG. 4.
FIG. 4.

Placement patterns of SCMC sensor elements on the electrodes. (1) Electrode, (2) coil array, (3) sensor element. Sets A and B: a sensor element is placed on the electrodes; Sets C and D: a sensor element is placed between two electrodes.

Image of FIG. 5.
FIG. 5.

Change in and parameters of thin sensor element with randomly oriented CMCs. Sensor element size: ; applied load: ; separation of the electrode: .

Image of FIG. 6.
FIG. 6.

(a) Arraying mode of SCMCs in sensor element and (b) change of and parameters. Placement pattern of the element on the electrode was the same as Fig. 4, set C. Sensor element size: .


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Scitation: Tactile microsensor elements prepared from arrayed superelastic carbon microcoils