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Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing
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10.1063/1.2006210
/content/aip/journal/apl/87/5/10.1063/1.2006210
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2006210

Figures

Image of FIG. 1.
FIG. 1.

Scanning electron microscopy (SEM) images of SOT tips: (a) a tip with all four sides etched to identical profile, which can be considered as a tip supported by four identical springs connected in parallel; (b) a different profile of a spring tip where the tip is effectively supported by one spring connected to the probe cantilever.

Image of FIG. 2.
FIG. 2.

A SOT tip with springs on two sidewalls. Two of four sidewalls have been completely removed.

Image of FIG. 3.
FIG. 3.

The spring system used to analyze the SOT probe.

Image of FIG. 4.
FIG. 4.

ANSYS simulation result for a sidewall of a SOT tip. The thickness of the film is . The result shows a deflection under force applied at the tip.

Image of FIG. 5.
FIG. 5.

(a) A LFM image of ODT lines generated by a SOT tip on a gold surface. The writing speeds for the lines are 0.1, 0.2, and the linewidths are 175, 120 and , respectively. (b) ODT linewidths generated by a SOT tip at different writing speeds.

Tables

Generic image for table
Table I.

ANSYS simulation results for SOT tip designs.

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/content/aip/journal/apl/87/5/10.1063/1.2006210
2005-07-27
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2006210
10.1063/1.2006210
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