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Surface stress model (Refs. 2 and 6) (a) and decomposition (b).
Deflection (top) and corrected (i.e., with the reference beam contribution subtracted) surface stress (bottom) evolution for the four silicon beams (beam , beam , beam , reference ); roughly every thousandth data point shown.
Deflection-based surface stress (the three black columns) and resonance-based surface stress obtained with modes one through six (엯, ▵, ▿, ◁, ▷, and ◻, respectively) of the three nonreference beams; the white columns and error bars denote the standard deviation resonance-based surface stress values.
Measured resonance frequencies before (, kHz) and after adsorption (, kHz), and the calculated surface stresses for the three nonreference beams (, mN/m).
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