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Influence of surface stress on the resonance behavior of microcantilevers
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10.1063/1.2006212
/content/aip/journal/apl/87/5/10.1063/1.2006212
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2006212

Figures

Image of FIG. 1.
FIG. 1.

Surface stress model (Refs. 2 and 6) (a) and decomposition (b).

Image of FIG. 2.
FIG. 2.

Deflection (top) and corrected (i.e., with the reference beam contribution subtracted) surface stress (bottom) evolution for the four silicon beams (beam , beam , beam , reference ); roughly every thousandth data point shown.

Image of FIG. 3.
FIG. 3.

Deflection-based surface stress (the three black columns) and resonance-based surface stress obtained with modes one through six (엯, ▵, ▿, ◁, ▷, and ◻, respectively) of the three nonreference beams; the white columns and error bars denote the standard deviation resonance-based surface stress values.

Tables

Generic image for table
Table I.

Measured resonance frequencies before (, kHz) and after adsorption (, kHz), and the calculated surface stresses for the three nonreference beams (, mN/m).

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/content/aip/journal/apl/87/5/10.1063/1.2006212
2005-07-28
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of surface stress on the resonance behavior of microcantilevers
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2006212
10.1063/1.2006212
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