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Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
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10.1063/1.2006979
/content/aip/journal/apl/87/5/10.1063/1.2006979
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2006979
/content/aip/journal/apl/87/5/10.1063/1.2006979
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/content/aip/journal/apl/87/5/10.1063/1.2006979
2005-07-27
2014-11-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Physical mechanism of oxide interfacial traps, carrier mobility degradation and series resistance on contrast reversal in scanning-capacitance-microscopy dopant concentration extraction
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2006979
10.1063/1.2006979
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